Ultra High Vacuum Sputtering System Sputterer and Evaporator

Yong Zhang

Manufacturing and Processing Machinery Design Ultra High Vacuum Sputtering System Sputterer and Evaporator by Yong Zhang The system is equipped with multiple UHV chambers: evaporation chamber, sputtering chamber, processing chamber, load lock, electron beam evaporation source. The whole system is fully automatic control, which supports semi-automatic mode, manual mode, and remote maintenance. The UHV Sputter System has neat and intuitive modelling, elaborate surface treatment, smooth and brightening texture, which gives the person a feeling of soft, simple, modern and beautiful. Ergonomic design pursues the details.

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